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Pulsed DC sputtered aluminum nitride: a novel approach to control stress and C-axis orientation
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1936 since deposited on 2021-10-16
3last month
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Acq. date: 2025-12-13
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Views
1936 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2025-12-13
Citations