Publication:
Scanning spreading resistance microscopy of fully depleted SOI devices
Date
| dc.contributor.author | Alvarez, David | |
| dc.contributor.author | Hartwich, J. | |
| dc.contributor.author | Kretz, J. | |
| dc.contributor.author | Fouchier, Marc | |
| dc.date.accessioned | 2021-10-14T21:07:06Z | |
| dc.date.available | 2021-10-14T21:07:06Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5948 | |
| dc.source.conference | Micro- and Nano-Engineering - MNE | |
| dc.source.conferencedate | 17/09/2002 | |
| dc.source.conferencelocation | Lugano Switzerland | |
| dc.title | Scanning spreading resistance microscopy of fully depleted SOI devices | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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