Publication:

On the use of SF5/Ar/Ga for the analysis of very thin dielectrica with TOFSIMS

Date

2001
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Author(s)

Conard, Thierry  
;
Vandervorst, Wilfried  

Journal

Abstract

Description

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1823 since deposited on 2021-10-14
Acq. date: 2026-02-27

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1823 since deposited on 2021-10-14
Acq. date: 2026-02-27

Citations