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SiGe MEMS technology
Publication:
SiGe MEMS technology
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Date
2009
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Witvrouw, Ann
Journal
MEMS Industry Group (MIG) Newsletter
Abstract
Description
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1809
since deposited on 2021-10-18
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Acq. date: 2025-12-15
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Metrics
Views
1809
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-15
Citations