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Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

Date

2005-09
Journal article
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dc.contributor.authorGoux, Ludovic
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, Michael
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorMenou, N.
dc.contributor.authorTurquat, Ch.
dc.contributor.authorMadigou, V.
dc.contributor.authorMuller, Ch.
dc.contributor.authorZambrano, R.
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.date.accessioned2021-10-16T01:47:59Z
dc.date.available2021-10-16T01:47:59Z
dc.date.issued2005-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10517
dc.source.beginpage054507-1
dc.source.endpage054507-7
dc.source.issue5
dc.source.journalJournal of Applied Physics
dc.source.volume98
dc.title

Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

dc.typeJournal article
dspace.entity.typePublication
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