Publication:

MEMS and thin film passives technologies for new Systems in a Package

Date

2004
Presentation
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dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.authorBeyne, Eric
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.accessioned2021-10-15T13:06:08Z
dc.date.available2021-10-15T13:06:08Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8789
dc.source.conferenceJapan SiP Forum
dc.source.conferencedate14/05/2004
dc.source.conferencelocationTokyo Japan
dc.title

MEMS and thin film passives technologies for new Systems in a Package

dc.typeOral presentation
dspace.entity.typePublication
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