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Publication:

CD control for 180-nm and 130-nm gate-level lithography

Date

1996

Journal article

Simple item page Full metadata Statistics

Files

1268.pdf 530.25 KB

Author(s)

;

;

Goethals, Mieke

;

Vandenberghe, Geert

;

Van den hove, Luc

Journal

Microlithography World

Statistics

2035 since deposited on 2021-09-29

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Acq. date: 2026-07-27