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Hydrogen passivation of HF-last cleaned (100) silicon surfaces: a MIR-FTIR study
Publication:
Hydrogen passivation of HF-last cleaned (100) silicon surfaces: a MIR-FTIR study
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Date
1994
Proceedings Paper
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29572.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bender, Hugo
;
Verhaverbeke, Steven
;
Heyns, Marc
Journal
Abstract
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2006
since deposited on 2021-09-29
2
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
2006
since deposited on 2021-09-29
2
last month
Acq. date: 2025-12-15
Citations