Publication:
Exploration of EUV-based self-aligned multipatterning (SAMP) options targeting pitches below 20 nm
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2016 since deposited on 2021-10-27
3last month
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Acq. date: 2026-01-07
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2016 since deposited on 2021-10-27
3last month
2last week
Acq. date: 2026-01-07
Citations