Publication:
Exploration of EUV-based self-aligned multipatterning (SAMP) options targeting pitches below 20 nm
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2013 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-15
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Metrics
Views
2013 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-15
Citations