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Variability of quadruple-patterning interconnect processes

Date

2015
Proceedings Paper
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dc.contributor.authorBaert, Rogier
dc.contributor.authorCiofi, Ivan
dc.contributor.authorWilson, Chris
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorRyckaert, Julien
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.accessioned2021-10-22T18:31:01Z
dc.date.available2021-10-22T18:31:01Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24951
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325645
dc.source.beginpage135
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM
dc.source.conferencedate18/05/2015
dc.source.conferencelocationGrenoble France
dc.source.endpage138
dc.title

Variability of quadruple-patterning interconnect processes

dc.typeProceedings paper
dspace.entity.typePublication
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