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Blue-violet emission of silicon carbonitride thin films prepared by sputtering and annealing treatment

Date

2021
Journal article
https://doi.org/10.1016/j.apsusc.2021.149121
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dc.contributor.authorLi, Qiang
dc.contributor.authorChen, Cheng
dc.contributor.authorXu, Manzhang
dc.contributor.authorWang, Yingnan
dc.contributor.authorWang, Xuewen
dc.contributor.authorZhang, Zhiyong
dc.contributor.authorZhao, Wu
dc.contributor.authorStiens, Johan
dc.contributor.imecauthorStiens, Johan
dc.contributor.orcidextChen, Cheng::0000-0002-3278-8707
dc.date.accessioned2022-03-04T11:16:21Z
dc.date.available2021-11-02T16:04:17Z
dc.date.available2022-03-04T11:16:21Z
dc.date.issued2021
dc.identifier.doi10.1016/j.apsusc.2021.149121
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38126
dc.publisherELSEVIER
dc.source.beginpage149121
dc.source.issuena
dc.source.journalAPPLIED SURFACE SCIENCE
dc.source.numberofpages6
dc.source.volume546
dc.title

Blue-violet emission of silicon carbonitride thin films prepared by sputtering and annealing treatment

dc.typeJournal article
dspace.entity.typePublication
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