Publication:

Accurate electrical activation characterization of CMOS ultra-shallow profiles

Date

2004
Journal article
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dc.contributor.authorClarysse, Trudo
dc.contributor.authorDortu, Fabian
dc.contributor.authorVanhaeren, Danielle
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorGeenen, Luc
dc.contributor.authorJanssens, Tom
dc.contributor.authorLoo, Roger
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPawlak, Bartek
dc.contributor.authorOuzeaud, V.
dc.contributor.authorDefranoux, C.
dc.contributor.authorFaifer, V.N.
dc.contributor.authorCurrent, M.I.
dc.contributor.imecauthorVanhaeren, Danielle
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.orcidimecVanhaeren, Danielle::0000-0001-8624-9533
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-15T12:53:44Z
dc.date.available2021-10-15T12:53:44Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8696
dc.source.beginpage166
dc.source.endpage173
dc.source.journalMaterials Science and Engineering B
dc.source.volume114-115
dc.title

Accurate electrical activation characterization of CMOS ultra-shallow profiles

dc.typeJournal article
dspace.entity.typePublication
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