Publication:
Pattern collapse and particle removal forces of interest to semiconductor fabrication process
Date
| dc.contributor.author | Kim, Tae-Gon | |
| dc.contributor.author | Wostyn, Kurt | |
| dc.contributor.author | Park, Jin-Goo | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Busnaina, Ahmed | |
| dc.contributor.imecauthor | Wostyn, Kurt | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.orcidimec | Wostyn, Kurt::0000-0003-3995-0292 | |
| dc.date.accessioned | 2021-10-17T23:27:45Z | |
| dc.date.available | 2021-10-17T23:27:45Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 1662-9779 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15599 | |
| dc.identifier.url | www.scientific.net | |
| dc.source.beginpage | 47 | |
| dc.source.endpage | 50 | |
| dc.source.journal | Solid State Phenomena | |
| dc.source.volume | 145-146 | |
| dc.title | Pattern collapse and particle removal forces of interest to semiconductor fabrication process | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |