Low-loss, multi-reticle stitched SiN waveguides for 300mm wafer-level optical interconnects

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Author(s)

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Marchese, Chiara

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Golshani, Negin

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Van Eenaeme, Ruben

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Mingardi, Andrea

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Van Ongeval, Joost

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Magdziak, Rafal

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Trivkovic, Darko

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Verheyen, Peter

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Chakrabarti, Maumita

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Velenis, Dimitrios

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Ferraro, Filippo

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Van Campenhout, Joris

Journal

N/A

Metrics

269 since deposited on 2024-10-17

Acq. date: 2025-10-24