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Efficiency of ozonated DI water in removing organic contamination
Publication:
Efficiency of ozonated DI water in removing organic contamination
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Date
1998
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kenens, Conny
;
De Gendt, Stefan
;
Knotter, D. M.
;
Loewenstein, Lee
;
Meuris, Marc
;
Vandervorst, Wilfried
;
Heyns, Marc
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1919
since deposited on 2021-09-30
Acq. date: 2026-01-07
Citations
Metrics
Views
1919
since deposited on 2021-09-30
Acq. date: 2026-01-07
Citations