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Buried Bitline for sub-5nm SRAM Design

 
dc.contributor.authorMathur, R.
dc.contributor.authorBhargava, M.
dc.contributor.authorAnnamalai, S.
dc.contributor.authorChong, Y. K.
dc.contributor.authorSinha, S.
dc.contributor.authorCline, B.
dc.contributor.authorKulkarni, J. P.
dc.contributor.authorSalahuddin, Shairfe Muhammad
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorRyckaert, Julien
dc.contributor.authorGupta, Anshul
dc.contributor.imecauthorSalahuddin, S.
dc.contributor.imecauthorSchuddinck, P.
dc.contributor.imecauthorRyckaert, J.
dc.contributor.imecauthorGupta, A.
dc.contributor.imecauthorSalahuddin, Shairfe Muhammad
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorGupta, Anshul
dc.contributor.orcidimecSalahuddin, Shairfe Muhammad::0000-0002-6483-8430
dc.date.accessioned2021-12-06T10:24:15Z
dc.date.available2021-12-06T02:06:50Z
dc.date.available2021-12-06T10:24:15Z
dc.date.issued2020
dc.identifier.doi10.1109/IEDM13553.2020.9372042
dc.identifier.eisbn978-1-7281-8888-1
dc.identifier.issn2380-9248
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38565
dc.publisherIEEE
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 12-18, 2020
dc.source.conferencelocationSan Francisco, CA, USA
dc.source.journalna
dc.source.numberofpages4
dc.title

Buried Bitline for sub-5nm SRAM Design

dc.typeProceedings paper
dspace.entity.typePublication
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