Publication:
Effect of the composition of electrolyte on separation of porous silicon film by electrochemial etching
Date
| dc.contributor.author | Solanki, Chetan Singh | |
| dc.contributor.author | Bilyalov, Renat | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Nijs, Johan | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-15T06:45:20Z | |
| dc.date.available | 2021-10-15T06:45:20Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8163 | |
| dc.source.beginpage | 507 | |
| dc.source.endpage | 511 | |
| dc.source.issue | 2 | |
| dc.source.journal | Physica Status Solidi A | |
| dc.source.volume | 197 | |
| dc.title | Effect of the composition of electrolyte on separation of porous silicon film by electrochemial etching | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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