Publication:

NXE:3300 insertion for N7 : status and challenges

Date

2015
Proceedings Paper
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dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorMochi, Iacopo
dc.contributor.authorVan Look, Lieve
dc.contributor.authorLorusso, Gian
dc.contributor.authorLuong, Vu
dc.contributor.authorHendrickx, Eric
dc.contributor.authorWittebrood, Friso
dc.contributor.authorSchiffelers, Guido
dc.contributor.authorvan Setten, Eelco
dc.contributor.authorFliervoet, Timon
dc.contributor.authorDusa, Mircea
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorLuong, Vu
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorSchiffelers, Guido
dc.contributor.imecauthorFliervoet, Timon
dc.contributor.imecauthorDusa, Mircea
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.contributor.orcidimecHendrickx, Eric::0000-0003-2516-0417
dc.date.accessioned2021-10-22T21:49:22Z
dc.date.available2021-10-22T21:49:22Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25758
dc.source.conferenceInternational Symposium on Extreme Ultraviolet Lithography - EUVL
dc.source.conferencedate5/10/2015
dc.source.conferencelocationMaastricht Netherlands
dc.title

NXE:3300 insertion for N7 : status and challenges

dc.typeProceedings paper
dspace.entity.typePublication
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