Observation and characterization of defects in HfO2 High-K gate dielectric layers

Simple item page Full metadata Statistics

Author(s)

;

;

Delabie, Annelies

;

Van Elshocht, Sven

;

Richard, Olivier

;

Conard, Thierry

;

;

Witters, Thomas

;

;

De Gendt, Stefan

;

Metrics

1976 since deposited on 2021-10-15

Acq. date: 2025-10-24