Publication:

Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films

Date

2015
Journal article
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dc.contributor.authorSun, Yiting
dc.contributor.authorLevrau, Elisabeth
dc.contributor.authorZhang, Liping
dc.contributor.authorGeypen, Jef
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorFranquet, Alexis
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBender, Hugo
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorDe Feyter, Steven
dc.contributor.authorArmini, Silvia
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorLevrau, Elisabeth
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2021-10-22T23:14:28Z
dc.date.available2021-10-22T23:14:28Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25953
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931714004572
dc.source.beginpage70
dc.source.endpage74
dc.source.journalMicroelectronic Engineering
dc.source.volume137
dc.title

Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films

dc.typeJournal article
dspace.entity.typePublication
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