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Relation between particle density and haze on a wafer: a new approach to measuring nano-sized particles
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Relation between particle density and haze on a wafer: a new approach to measuring nano-sized particles
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Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xu, Kaidong
;
Vos, Rita
;
Vereecke, Guy
;
Lux, Marcel
;
Fyen, Wim
;
Holsteyns, Frank
;
Kenis, Karine
;
Mertens, Paul
;
Heyns, Marc
;
Vinckier, Chris
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1895
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Acq. date: 2025-12-16
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Views
1895
since deposited on 2021-10-15
3
last month
Acq. date: 2025-12-16
Citations