Publication:

Wafer level detection of sealing defects

Date

2003
Presentation
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dc.contributor.authorLe, Quoc Toan
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorIacopi, Francesca
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.date.accessioned2021-10-15T05:20:16Z
dc.date.available2021-10-15T05:20:16Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7787
dc.source.conferenceMRS Spring Meeting Symposium E: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics
dc.source.conferencedate21/04/2003
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Wafer level detection of sealing defects

dc.typeOral presentation
dspace.entity.typePublication
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