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imec Publications
Conference contributions
Self-focusing SIMS: a novel metrology for area-selective deposition
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Self-focusing SIMS: a novel metrology for area-selective deposition
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Date
2017
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36456.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Spampinato, Valentina
;
Armini, Silvia
;
Franquet, Alexis
;
Conard, Thierry
;
Vandervorst, Wilfried
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1851
since deposited on 2021-10-24
Acq. date: 2025-12-17
Citations
Metrics
Views
1851
since deposited on 2021-10-24
Acq. date: 2025-12-17
Citations