Publication:
Germanium surface segregation in the silicon passivation of Ge pMOSFETs: influence of the Si precursor
Date
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Vincent, Benjamin | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Vincent, Benjamin | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-18T15:30:47Z | |
| dc.date.available | 2021-10-18T15:30:47Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16836 | |
| dc.source.beginpage | 11 | |
| dc.source.conference | 5th Int. Workshop on New Group IV Semiconductor Nanoelectronics | |
| dc.source.conferencedate | 29/01/2010 | |
| dc.source.conferencelocation | Sendai Japan | |
| dc.source.endpage | 12 | |
| dc.title | Germanium surface segregation in the silicon passivation of Ge pMOSFETs: influence of the Si precursor | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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