Publication:
Atom probe tomography for advanced semiconductor metrology
Date
| dc.contributor.author | Gilbert, Matthieu | |
| dc.contributor.author | Kambham, Ajay Kumar | |
| dc.contributor.author | Kumar, Arul | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-20T11:12:21Z | |
| dc.date.available | 2021-10-20T11:12:21Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20723 | |
| dc.source.conference | International Field Emission Symposium- IFES | |
| dc.source.conferencedate | 21/05/2012 | |
| dc.source.conferencelocation | Tuscaloosa, AL USA | |
| dc.title | Atom probe tomography for advanced semiconductor metrology | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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