Publication:
Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy
Date
| dc.contributor.author | Leonov, Vladimir | |
| dc.contributor.author | Perova, Natalia A. | |
| dc.contributor.author | De Moor, Piet | |
| dc.contributor.author | Du Bois, Bert | |
| dc.contributor.author | Goessens, Claus | |
| dc.contributor.author | Grietens, Bob | |
| dc.contributor.author | Verbist, Agnes | |
| dc.contributor.author | Vermeiren, Jan | |
| dc.contributor.imecauthor | Leonov, Vladimir | |
| dc.contributor.imecauthor | De Moor, Piet | |
| dc.contributor.imecauthor | Du Bois, Bert | |
| dc.contributor.orcidimec | Leonov, Vladimir::0000-0002-4364-8945 | |
| dc.contributor.orcidimec | Du Bois, Bert::0000-0003-0147-1296 | |
| dc.date.accessioned | 2021-10-15T05:22:12Z | |
| dc.date.available | 2021-10-15T05:22:12Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7796 | |
| dc.source.beginpage | 54 | |
| dc.source.conference | MEMS/MOEMS: Advances in Photonics Communications, Sensing, Metrology, Packaging and Assembly | |
| dc.source.conferencedate | 28/10/2002 | |
| dc.source.conferencelocation | Brugge Belgium | |
| dc.source.endpage | 63 | |
| dc.title | Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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