Publication:
A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators
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1960 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-14
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Metrics
Views
1960 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-14
Citations