Publication:
A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators
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1961 since deposited on 2021-10-18
1last month
Acq. date: 2026-01-27
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Statistics
Views
1961 since deposited on 2021-10-18
1last month
Acq. date: 2026-01-27
Citations