Publication:

Reliability of RF-MEMS

Date

2003
Proceedings Paper
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dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorCarchon, Geert
dc.contributor.authorFiorini, Paolo
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-15T04:26:03Z
dc.date.available2021-10-15T04:26:03Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7468
dc.source.beginpage55
dc.source.conferenceAbstracts Book and Programme 4th Round Table on Micro/Nano Technologies for Space
dc.source.conferencedate20/05/2003
dc.source.conferencelocationNoordwijk The Netherlands
dc.title

Reliability of RF-MEMS

dc.typeProceedings paper
dspace.entity.typePublication
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