Publication:

Copper plating for 3D interconnects

Date

2011

Journal article

Simple item page Full metadata Statistics

Author(s)

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Philipsen, Harold

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Drijbooms, Chris

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Ruythooren, Wouter

Journal

Microelectronic Engineering

Statistics

1998 since deposited on 2021-10-19

Acq. date: 2026-01-26