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Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions
Publication:
Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dixit, Abhisek
;
Rooyackers, Rita
;
Leys, Frederik
;
Kaiser, Monja
;
Weemaes, R.
;
Ferain, Isabelle
;
De Keersgieter, An
;
Collaert, Nadine
;
Surdeanu, Radu
;
Goodwin, Michael
;
Zimmerman, Paul
;
Loo, Roger
;
Caymax, Matty
;
Jurczak, Gosia
;
Biesemans, Serge
;
De Meyer, Kristin
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1891
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1891
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations