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Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions

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1894 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08

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1894 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08

Citations