Publication:

Minimization of the MuGFET contact resistance by integration of NiSi contacts on epitaxially raised source/drain regions

Date

2005

Proceedings Paper

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Author(s)

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Rooyackers, Rita

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Ferain, Isabelle

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De Keersgieter, An

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Collaert, Nadine

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Goodwin, Michael

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Zimmerman, Paul

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Biesemans, Serge

;

De Meyer, Kristin

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