Publication:

Properties of ultrathin high permittivity NbTaO films prepared by aqueous chemical solution deposition

Date

2010
Journal article
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Author(s)

Hardy, An  
;
Van Elshocht, Sven  
;
Dewulf, Daan
;
Clima, Sergiu  
;
Peys, Nick
;
Adelmann, Christoph  
;
Opsomer, Karl  
;
Favia, Paola  
;
Bender, Hugo  
;
Hoflijk, Ilse  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Van den Rul, Heidi
;
Kittl, Jorge
;
De Gendt, Stefan  
;
Van Bael, Marlies K.
;
Mullens, J.

Journal

Journal of the Electrochemical Society

Abstract

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