Publication:
Tof-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3 oxides
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1952 since deposited on 2021-10-15
Acq. date: 2026-01-12
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Views
1952 since deposited on 2021-10-15
Acq. date: 2026-01-12
Citations