Publication:
Low-k materials engineering from 10 nm technology node and beyond
Date
| dc.contributor.author | Krishtab, Mikhail | |
| dc.contributor.imecauthor | Krishtab, Mikhail | |
| dc.contributor.orcidimec | Krishtab, Mikhail::0000-0001-6215-8506 | |
| dc.contributor.thesisadvisor | De Gendt, Stefan | |
| dc.contributor.thesisadvisor | Ameloot, Rob | |
| dc.date.accessioned | 2023-02-21T12:07:14Z | |
| dc.date.available | 2023-02-21T12:07:14Z | |
| dc.date.issued | 2022 | |
| dc.identifier.isbn | na | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41121 | |
| dc.title | Low-k materials engineering from 10 nm technology node and beyond | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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