Publication:

Replication of submicron structures by nano-imprint lithography

Date

 
dc.contributor.authorScheerlinck, Stijn
dc.date.accessioned2021-10-15T16:02:52Z
dc.date.available2021-10-15T16:02:52Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9556
dc.source.conference5th FTW PHD Symposium
dc.source.conferencedate1/12/2004
dc.source.conferencelocationGent Belgium
dc.title

Replication of submicron structures by nano-imprint lithography

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections: