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Untersuchung der Heliumimplantation als Schlüsselprozess in der Relaxtion von pseudomorphischen SiGe/Si Heterostrukturen

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2023 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06

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2023 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06

Citations