Publication:
Untersuchung der Heliumimplantation als Schlüsselprozess in der Relaxtion von pseudomorphischen SiGe/Si Heterostrukturen
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2015 since deposited on 2021-10-15
Acq. date: 2025-10-23
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2015 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations