Publication:

Fundamental understanding and experimental verification of bright versus dark field imaging

Date

2020
Proceedings Paper
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dc.contributor.authorDavydova, Natalia
dc.contributor.authorFinders, Jo
dc.contributor.authorvan Lare, Claire
dc.contributor.authorMcNamara, John
dc.contributor.authorVan Setten, Eelco
dc.contributor.authorZekry, Joseph
dc.contributor.authorFliervoet, Timon
dc.contributor.authorCarpaij, Rene
dc.contributor.authorFranke, Joern-Holger
dc.contributor.authorFrommhold, Andreas
dc.contributor.authorVerch, Andreas
dc.contributor.authorKersteen, Grizelda
dc.contributor.authorCapelli, Renzo
dc.contributor.imecauthorFliervoet, Timon
dc.contributor.imecauthorFranke, Joern-Holger
dc.contributor.imecauthorFrommhold, Andreas
dc.contributor.orcidimecFranke, Joern-Holger::0000-0002-3571-1633
dc.contributor.orcidimecFrommhold, Andreas::0000-0001-6824-5643
dc.date.accessioned2021-10-28T20:56:17Z
dc.date.available2021-10-28T20:56:17Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34956
dc.identifier.urlhttps://doi.org/10.1117/12.2573161
dc.source.beginpage115170P
dc.source.conferenceExtreme Ultraviolet Lithography 2020
dc.source.conferencedate21/09/2020
dc.source.conferencelocationonline online
dc.title

Fundamental understanding and experimental verification of bright versus dark field imaging

dc.typeProceedings paper
dspace.entity.typePublication
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