Publication:
Hydrogen induced positive charge generation in gate oxides
Date
| dc.contributor.author | Zhang, J.F. | |
| dc.contributor.author | Zhao, C.Z. | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Ellis, J. N. | |
| dc.contributor.author | Beech, C. D. | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.date.accessioned | 2021-10-14T18:31:03Z | |
| dc.date.available | 2021-10-14T18:31:03Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5869 | |
| dc.source.beginpage | 1911 | |
| dc.source.endpage | 1919 | |
| dc.source.issue | 4 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 90 | |
| dc.title | Hydrogen induced positive charge generation in gate oxides | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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