Publication:

Gate isolation technology for compact poly-CMP embedded flash memories

Date

2003
Proceedings Paper
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dc.contributor.authorSlotboom, Michiel
dc.contributor.authorGoarin, Pierre
dc.contributor.authorAkil, Nader
dc.contributor.authorVan Duuren, Michiel
dc.contributor.authorDemand, Marc
dc.contributor.authorWouters, Johan M. D.
dc.contributor.authorBeckx, Stephan
dc.contributor.authorLeray, Philippe
dc.contributor.authorBaerts, Christina
dc.contributor.authorHeylen, Nancy
dc.contributor.authorPollentier, Ivan
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorWouters, Johan M. D.
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorBaerts, Christina
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.accessioned2021-10-15T06:44:00Z
dc.date.available2021-10-15T06:44:00Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8158
dc.source.conference33rd European Solid-State Devices Research Conference - ESSDERC
dc.source.conferencedate16/09/2003
dc.source.conferencelocationEstoril Portugal
dc.title

Gate isolation technology for compact poly-CMP embedded flash memories

dc.typeProceedings paper
dspace.entity.typePublication
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