Publication:

Understanding the impact of Cu surface pre-treatment on Octadecanethiol-derived self-assembled monolayer as a mask for area-selective deposition

Date

2021
Journal article
https://doi.org/10.1016/j.apsusc.2020.148307
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dc.contributor.authorPasquali, Mattia
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorArmini, Silvia
dc.contributor.imecauthorPasquali, Mattia
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecPasquali, Mattia::0000-0002-1309-1082
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2022-02-18T13:11:14Z
dc.date.available2022-02-18T13:11:14Z
dc.date.issued2021
dc.identifier.doi10.1016/j.apsusc.2020.148307
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38886
dc.publisherELSEVIER
dc.source.beginpage148307
dc.source.issuena
dc.source.journalAPPLIED SURFACE SCIENCE
dc.source.numberofpages11
dc.source.volume540
dc.subject.keywordsATOMIC LAYER DEPOSITION
dc.subject.keywordsOXIDIZED METALS
dc.subject.keywordsN-ALKANETHIOLS
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsCOPPER
dc.subject.keywordsGOLD
dc.subject.keywordsKINETICS
dc.subject.keywordsORIENTATION
dc.subject.keywordsCHEMISTRY
dc.subject.keywordsPLATINUM
dc.title

Understanding the impact of Cu surface pre-treatment on Octadecanethiol-derived self-assembled monolayer as a mask for area-selective deposition

dc.typeJournal article
dspace.entity.typePublication
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