Publication:

Multi-gate devices for the 32nm technology node and beyond

Date

2007
Proceedings Paper
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Author(s)

Collaert, Nadine  
;
De Keersgieter, An  
;
Dixit, Abhisek
;
Ferain, Isabelle
;
Lai, Li-Shyue
;
Lenoble, Damien
;
Mercha, Abdelkarim  
;
Nackaerts, Axel
;
Pawlak, Bartek  
;
Rooyackers, Rita
;
Schulz, Thomas
;
San, Kemal Tamer
;
Son, Nak Jin
;
Van Dal, Mark  
;
Verheyen, Peter  
;
von Arnim, Klaus
;
Witters, Liesbeth  
;
De Meyer, Kristin  
;
Biesemans, Serge  
;
Jurczak, Gosia  

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2001 since deposited on 2021-10-16
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2001 since deposited on 2021-10-16
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Acq. date: 2026-01-26

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