Publication:
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
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1973 since deposited on 2021-10-15
2last month
Acq. date: 2026-02-25
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Views
1973 since deposited on 2021-10-15
2last month
Acq. date: 2026-02-25
Citations