Publication:
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1973 since deposited on 2021-10-15
Acq. date: 2026-03-17
Citations
Statistics
Views
1973 since deposited on 2021-10-15
Acq. date: 2026-03-17
Citations