Publication:

Metal hard-mask based double patterning for 22nm and beyond

Date

2010
Proceedings Paper
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Author(s)

Struyf, Herbert  
;
de Marneffe, Jean-Francois  
;
Goossens, Danny  
;
Hendrickx, Dirk  
;
Huffman, Craig
;
Kunnen, Eddy
;
Lazzarino, Frederic  
;
Milenin, Alexey  
;
Shamiryan, Denis
;
Urbanowicz, Adam
;
Vandervorst, Alain
;
Boullart, Werner  

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