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Spectroellipsometric characterisation of thin epitaxial Si1-x Gex layers
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Spectroellipsometric characterisation of thin epitaxial Si1-x Gex layers
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Date
1995
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Libezny, Milan
;
Caymax, Matty
;
Brablec, A.
;
Kubena, J.
;
Holy, V.
;
Poortmans, Jef
;
Nijs, Johan
;
Vanhellemont, Jan
Journal
Materials Science and Technology
Abstract
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1959
since deposited on 2021-09-29
2
last month
Acq. date: 2026-01-06
Citations
Metrics
Views
1959
since deposited on 2021-09-29
2
last month
Acq. date: 2026-01-06
Citations