Publication:
Lifetime study in advanced isolation techniques
Date
| dc.contributor.author | Poyai, Amporn | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Rooyackers, Rita | |
| dc.contributor.author | Badenes, Gonçal | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T17:38:44Z | |
| dc.date.available | 2021-10-14T17:38:44Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5592 | |
| dc.source.beginpage | 137 | |
| dc.source.endpage | 139 | |
| dc.source.issue | 1_3 | |
| dc.source.journal | Materials Science in Semiconductor Processing | |
| dc.source.volume | 4 | |
| dc.title | Lifetime study in advanced isolation techniques | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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