Publication:
Challenges of plasma damage of low-k materials
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.author | Vanhaelemeersch, Serge | |
| dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
| dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
| dc.date.accessioned | 2021-10-16T15:02:00Z | |
| dc.date.available | 2021-10-16T15:02:00Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11684 | |
| dc.source.beginpage | 100 | |
| dc.source.conference | 234th ACS Meeting | |
| dc.source.conferencedate | 19/08/2007 | |
| dc.source.conferencelocation | Boston USA | |
| dc.source.endpage | 103 | |
| dc.title | Challenges of plasma damage of low-k materials | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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