Publication:

Triple junctions for reduced impact of offset spacer variation on CMOS device parameters

Date

2004-09
Proceedings Paper
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dc.contributor.authorJurczak, Gosia
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorKunnen, Eddy
dc.contributor.authorHenson, Kirklen
dc.contributor.authorRichard, Olivier
dc.contributor.authorDachs, Charles
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorRichard, Olivier
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-15T14:05:37Z
dc.date.available2021-10-15T14:05:37Z
dc.date.issued2004-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9105
dc.source.beginpage145
dc.source.conferenceProceedings of the 34th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate21/09/2004
dc.source.conferencelocationLeuven Belgium
dc.source.endpage148
dc.title

Triple junctions for reduced impact of offset spacer variation on CMOS device parameters

dc.typeProceedings paper
dspace.entity.typePublication
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