Publication:

Optimization of the crystallization phase of rare-earth aluminates for blocking dielectric application in TANOS type Flash memories

Date

2010
Proceedings Paper
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dc.contributor.authorBreuil, Laurent
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorCacciato, Antonio
dc.contributor.authorZahid, Mohammed
dc.contributor.authorToledano Luque, Maria
dc.contributor.authorSuhane, Amit
dc.contributor.authorArreghini, Antonio
dc.contributor.authorDegraeve, Robin
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorKittl, Jorge
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-18T15:26:33Z
dc.date.available2021-10-18T15:26:33Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16801
dc.source.beginpage440
dc.source.conference40th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate13/09/2010
dc.source.conferencelocationSevilla Spain
dc.source.endpage443
dc.title

Optimization of the crystallization phase of rare-earth aluminates for blocking dielectric application in TANOS type Flash memories

dc.typeProceedings paper
dspace.entity.typePublication
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