Publication:
Methods to measure mechanical properties of NEMS and MEMS: challenges and pitfalls
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1863 since deposited on 2021-10-17
5last month
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Acq. date: 2025-12-16
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Views
1863 since deposited on 2021-10-17
5last month
1last week
Acq. date: 2025-12-16
Citations