Publication:

Characterization of optical end-point detection for via reveal processing

Date

2018
Proceedings Paper
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dc.contributor.authorRassoul, Nouredine
dc.contributor.authorJourdain, Anne
dc.contributor.authorTutunjyan, Nina
dc.contributor.authorDe Vos, Joeri
dc.contributor.authorSardo, Stefano
dc.contributor.authorPiumi, Daniele
dc.contributor.authorMiller, Andy
dc.contributor.authorBeyne, Eric
dc.contributor.authorWalsby, Edward
dc.contributor.authorAshraf, Huma
dc.contributor.authorThomas, Dave
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorTutunjyan, Nina
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorSardo, Stefano
dc.contributor.imecauthorPiumi, Daniele
dc.contributor.imecauthorMiller, Andy
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorWalsby, Edward
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecSardo, Stefano::0000-0002-9302-8007
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.accessioned2021-10-26T02:13:53Z
dc.date.available2021-10-26T02:13:53Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31628
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8429695
dc.source.beginpage1181
dc.source.conferenceIEEE 68th Electronic Components and Technology Conference - ECTC
dc.source.conferencedate29/05/2018
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage1187
dc.title

Characterization of optical end-point detection for via reveal processing

dc.typeProceedings paper
dspace.entity.typePublication
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