Publication:

SSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacers

Date

2001
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorEyben, Pierre
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorStuer, Cindy
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorRooyackers, Rita
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBadenes, Gonçal
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-14T16:55:21Z
dc.date.available2021-10-14T16:55:21Z
dc.date.embargo9999-12-31
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5287
dc.source.beginpageJ2.2.1
dc.source.conferenceSi Front-End Processing-Physics and Technology of Dopant-Defect Interactions III
dc.source.conferencedate17/04/2001
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpageJ2.2.6
dc.title

SSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacers

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
5291.pdf
Size:
420.31 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions